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for EUV exposures and improved etch resistance compared to poly-hydroxystyrene. The second single molecule resist synthesized (NBB) is a non-ionic single molecule resist based on a sulfoni

However, NBB as shown in Figure 2 is the primary focus of this paper and is the first example of a chemically amplified Proc. of SPIE Vol. 7273 72733C-2 non-ionic single component molecular …

However, NBB as shown in Figure 2 is the primary focus of this paper and is the first example of a chemically amplified non-ionic single component molecular resist.

NBB first example of non-ionic bound sulfonic acid molecule resist Sulfonic acid is directly part of molecular glass core Norbornene dicarboximide PAG Superior solubility in casting solvent as …

A single component molecular resist with a covalently bound non-ionic photoacid generator (referred to here as NBB), i.e. one in which the photoacid anion is bound to the resist core, was …

Apr 1, 2009 · A single component molecular resist with a covalently bound non-ionic photoacid generator (referred to here as NBB), i.e. one in which the photoacid anion is bound to the resist …

Non-ionic PAG functional groups are being explored to increase solubility of compounds and lower outgassing. Oxime sulfonate based PAGs provide good flexibility for molecular design. …

Mar 27, 2008 · An ionic and non-ionic single molecule chemically amplified resist have been synthesized, characterized, and imaged under high resolution e-beam. The ionic single …

May 1, 2019 · One-component resists have received wide attentions recently, including CA and non-CA systems. The one-component CARs will not bring in incompatibility and have narrower …

May 15, 2024 · Non-ionic PAGs have been extensively developed for polymer initiation and surface curing. Their higher solubility adjustability in a variety of solvents and polymer matrices, …

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